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【科普】CBN的異質外延

關鍵詞 每日科普|2025-09-11 11:47:05|來源 磨料磨具
摘要 采用晶格常數和表面能都與CBN非常接近的金剛石作為襯底，可以實現CBN的異質外延。這些外延單晶CBN薄膜制備的成功使得有效地應用CBN薄膜制備半導體器件成為可能。此外，也可利用其他...

       采用晶格常數和表面能都與CBN非常接近的金剛石作為襯底，可以實現CBN的異質外延。這些外延單晶CBN薄膜制備的成功使得有效地應用CBN薄膜制備半導體器件成為可能。此外，也可利用其他材料作為襯底來進行CBN膜的異質外延。比如硅襯底預處理后可以實現TBN在襯底上的直接生長，可有效降低過渡層的厚度。

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